Paper Title:
Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering
  Abstract

The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.

  Info
Periodical
Advanced Materials Research (Volumes 79 - 82)
Edited by
Yansheng Yin and Xin Wang
Pages
931-934
DOI
10.4028/www.scientific.net/AMR.79-82.931
Citation
Liang Tang Zhang et al., 2009, Advanced Materials Research, 79-82, 931
Online since
August 2009
Price
US$ 28,-
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