Paper Title:

Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering

Periodical Advanced Materials Research (Volumes 79 - 82)
Main Theme Multi-Functional Materials and Structures II
Edited by Yansheng Yin and Xin Wang
Pages 931-934
DOI 10.4028/
Citation Liang Tang Zhang et al., 2009, Advanced Materials Research, 79-82, 931
Online since August 2009
Authors Liang Tang Zhang, Jie Song, Quan Feng Dong, Sun Tao Wu
Keywords MEMS Technology, Microscale Lithium Batteries, RF Magnetron Sputtering, V2O5
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The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.