Paper Title:
Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering

The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.

Advanced Materials Research (Volumes 79-82)
Edited by
Yansheng Yin and Xin Wang
L. T. Zhang, J. Song, Q. F. Dong, S. T. Wu, "Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering", Advanced Materials Research, Vols. 79-82, pp. 931-934, Aug. 2009
Online since
August 2009
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