Paper Title:
CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone Composite Abrasive on Hard Disk Substrate
  Abstract

A novel α-alumina-g-polyvinylpyrrolidone (α-Al2O3-g-PVP) composite abrasive was prepared by surface grafting polymerization. The chemical mechanical polishing (CMP) performances of the composite abrasive on hard disk substrate were investigated with a UNIPOL-1502 polishing machine. Analyses on the surface of polished substrate indicated that the α-Al2O3-g-PVP composite abrasive exhibited lower surface roughness, less scratch, and improved post-CMP cleaning performances than pure α-alumina abrasive under the same testing conditions.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
2135-2139
DOI
10.4028/www.scientific.net/AMR.97-101.2135
Citation
H. Lei, N. J. Bu, F. L. Chu, P. Hao, X. L. Hu, "CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone Composite Abrasive on Hard Disk Substrate", Advanced Materials Research, Vols. 97-101, pp. 2135-2139, 2010
Online since
March 2010
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Price
$32.00
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