Paper Title:
An Optimization Approach for Semiconductor Wafer Fabrication Scheduling Problem
  Abstract

Due to the increasing scale of scheduling problems, the study is to explore an effective optimize scheduling approach for the semiconductor wafer fab. Semiconductor manufacturing is widely regarded as one of the most complex manufacturing processes in the world. The particular complexity, characterized by reentrant flows, uncertainties, mixed processing styles, etc., leads to a great challenge in its scheduling. Without powerful scheduling techniques it becomes practically impossible to design a manufacturing system. So, by means of a new coding method, and the adaptive mechanism of crossover and mutation, an improved immune algorithm (IA) is presented to solve the scheduling problem. The algorithm is based on clonal selection and affinity maturation for finding optimal solutions. To demonstrate the efficiency of the IA, some numerical experiments are carried out. The results show that the IA will yield a more efficient solution than several other scheduler.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
2465-2468
DOI
10.4028/www.scientific.net/AMR.97-101.2465
Citation
Z. C. Cao, F. Qiao, Q. D. Wu, "An Optimization Approach for Semiconductor Wafer Fabrication Scheduling Problem", Advanced Materials Research, Vols. 97-101, pp. 2465-2468, 2010
Online since
March 2010
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Price
$32.00
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