Paper Title:
Study on Micro-Displacement Stage Driven by Piezoelectric Actuator
  Abstract

In order to improve the accuracy of position for the machine, a micro-displacement stage is deigned based on piezoelectric actuator and flexible hinge. The structure of the flexible hinge is analyzed reasonably. With the hybrid method of feedforward and digital PID control, the control process of the micro-displacement stage can be corrected and compensated. It is indicated by experiment that the maximum stroke of the micro-displacement stage is , and the position accuracy is , which can meet the requirement of precision and ultra-precision machining.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
2514-2517
DOI
10.4028/www.scientific.net/AMR.97-101.2514
Citation
D. Jing, J. Q. Lin, Y. C. Li, "Study on Micro-Displacement Stage Driven by Piezoelectric Actuator", Advanced Materials Research, Vols. 97-101, pp. 2514-2517, 2010
Online since
March 2010
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Price
$32.00
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