Paper Title:
Laminated Photoresist Sacrificial Layer Process for 3-D Movable Suspension Microstructures in LIGA-Based Surface Micromachining
  Abstract

The fabrication process of three-dimensional (3D) high-aspect-ratio MEMS devices entirely made of electroplated metals with suspending multilayered microstructures is reported. The technology used is a LIGA-liked micromachining process, called the laminated positive photoresist sacrificial layer process (LPSLP). The LPSLP allows in UV-lithography not only for thick resist mould for electroplating of cascaded metal structures but also for the sacrificial layer for supporting mechanically the suspensions. So far the LPSLP procedure has incorporated with more than five sacrificial layers, which allows for the creation of overhanging structures and freely moving parts like out-of-plane cantilever stacks. A description of the underlying fabrication principle and processing details is discussed in this paper. Thus the proposed procedures open a low-cost route for fabricating micro-components such as cantilevers, bridges, movable electrodes, and freestanding parts.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
2538-2541
DOI
10.4028/www.scientific.net/AMR.97-101.2538
Citation
Y. B. Wu, G. F. Ding, C. C. Zhang, H. Wang, "Laminated Photoresist Sacrificial Layer Process for 3-D Movable Suspension Microstructures in LIGA-Based Surface Micromachining", Advanced Materials Research, Vols. 97-101, pp. 2538-2541, 2010
Online since
March 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Takeshi Kobayashi, Jiunnjye Tsaur, Masaaki Ichiki, Ryutaro Maeda
Abstract:Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A...
37
Authors: Li Wen Chen, Chia Yen Lee, Chien Hsiung Tsai, Yung Chuan Chen
Abstract:This paper studies the residual stress distributions and tip deflections of microfabricated bilayer cantilevers of varying beam thickness and...
559
Authors: Meng Kao Yeh, Bo Yi Chen, Nyan Hwa Tai, Chien Chao Chiu
Abstract:Atomic force microscopy (AFM) is widely used in many fields, because of its outstanding force measurement ability in nano scale. Some...
377
Authors: Xiao Hu Zheng, Yuan Wei Liu, F. Gu, J.K. Kim, Dong Weon Lee
Abstract:A micro grooved finger has smaller bending stiffness and can be used to improve the performance of some micro cantilever devices. The...
1
Authors: Takahiro Kawashima, Atsushi Matsui, Kazuo Muto, Moeto Nagai, Takayuki Shibata
Chapter 5: MEMS/NEMS
Abstract:In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from...
575