Paper Title:
Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses
  Abstract

Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
3803-3806
DOI
10.4028/www.scientific.net/AMR.97-101.3803
Citation
Y. X. Hu, H. Zhang, Z. Q. Yao, "Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses", Advanced Materials Research, Vols. 97-101, pp. 3803-3806, 2010
Online since
March 2010
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$32.00
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