Paper Title:
Study on a Capacitive Micro-Mechanic Gyroscope
  Abstract

A micro-mechanic gyroscope design, which is used electrostatic comb driven, grid structure and capacitive detection, as well as its working principle, was proposed. Simulation and mode analysis using ANSYS were done while the simulation was consistent with theory. This gyroscope was designed and manufactured by body silicon technique, and after packaged, we got this gyroscope finally. The preliminary experiment test result showed that the first natural frequency is 4.06 kHz, and its sensitivity is 0.0279V//s.

  Info
Periodical
Advanced Materials Research (Volumes 97-101)
Edited by
Zhengyi Jiang and Chunliang Zhang
Pages
4478-4481
DOI
10.4028/www.scientific.net/AMR.97-101.4478
Citation
Y. B. Shi, Q. L. Tan, Q. Zhang, J. Liu, "Study on a Capacitive Micro-Mechanic Gyroscope", Advanced Materials Research, Vols. 97-101, pp. 4478-4481, 2010
Online since
March 2010
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Price
$32.00
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