A fluidized beds method used in the industry for deacidification of the fumed silica has several drawbacks. The present work was intended to develop a simple, rapid and cost-effective method for the deacidification of fumed silica with high specific surface area using microwave technique. The effect of microwave irradiation on the body of the fumed silica has been investigated. The experimental results show that the microwave irradiation technique has been effective in deacidification and suppressing the aggregation process of fumed silica. This new approach may be useful to accelerate the deacidification process and avoid the aggregation growth.