Paper Title:
Atmospheric Pressure Plasma-Enhanced CVD for Surface Modification: Principles and Applications
  Abstract

This review gives an overview of the characteristics of various non-thermal, nonequilibrium plasmas and outlines results of AP-PECVD with dielectric barrier discharges.

  Info
Periodical
Edited by
P. VINCENZINI
Pages
1173-1177
DOI
10.4028/www.scientific.net/AST.45.1173
Citation
M. L. Hitchman, S. E. Alexandrov, "Atmospheric Pressure Plasma-Enhanced CVD for Surface Modification: Principles and Applications", Advances in Science and Technology, Vol. 45, pp. 1173-1177, 2006
Online since
October 2006
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