Paper Title:
Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients
  Abstract

Possibilities of ZnO based thin films for applications as resistance materials with small temperature coefficients are investigated. The ZnO based thin films containing Cu, Mg, Al and In are deposited on sapphire c-face single crystal substrates or quartz glass substrates. Resistivities at room temperature and their temperature dependences of the obtained thin films are measured and discussed.

  Info
Periodical
Edited by
P. VINCENZINI
Pages
2376-2381
DOI
10.4028/www.scientific.net/AST.45.2376
Citation
Y. Sato, M. Goto, J. Ikeda, Y. Minakawa, S. Sato, "Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients", Advances in Science and Technology, Vol. 45, pp. 2376-2381, 2006
Online since
October 2006
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