Growth and Characterization of (012)- and (001)-Oriented Epitaxial Anatase Thin Films |
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| Journal | Advances in Science and Technology (Volume 46) |
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| Volume | Mass and Charge Transport in Inorganic Materials III |
| Edited by | P. VINCENZINI and V. BUSCAGLIA |
| Pages | 146-151 |
| DOI | 10.4028/www.scientific.net/AST.46.146 |
| Citation | Andriy Lotnyk et al., 2006, Advances in Science and Technology, 46, 146 |
| Online since | October, 2006 |
| Authors | Andriy Lotnyk, Stephan Senz, Dietrich Hesse |
| Keywords | Anatase, Electron Beam Evaporation, Epitaxial, Thin Film |
| Abstract | Single phase TiO2 thin films of anatase structure have been prepared by reactive electron beam evaporation. Epitaxial (012)- and (001)-oriented anatase films were successfully obtained on (110)- and (100)-oriented SrTiO3 substrates, respectively. X-ray diffraction and cross section transmission electron microscopy investigations revealed a good epitaxial quality of the anatase films grown on the SrTiO3 substrates. |
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