Paper Title:
Sub-Wavelength Texturing for Solar Cells Using Interferometric Lithography
  Abstract

We have employed Interferometric Lithography (IL) for sub-wavelength surface texturing on large area silicon substrates. Low defect density Reactive Ion Etching (RIE) processes have been developed to transfer the pattern into the silicon using SF 6 plasma. Reflection measurements on the sub-wavelength textured surface have been carried out and show a substantial reduction from ~30% to below 4% over the spectrum range from 400nm to 1200nm. IL is a mask-less lithography technique which is used to define periodic patterns. The theoretical limit of the pitch size of the structure is half of the wavelength of the light source. Hence, the sub-wavelength patterns can be achieved easily. Moreover, sub-wavelength texturing requires short RIE processes; most of the plasma-induced damage on the silicon surface can be avoided.

  Info
Periodical
Edited by
P. VINCENZINI and G. MARLETTA
Pages
115-120
DOI
10.4028/www.scientific.net/AST.51.115
Citation
W.L. Chiu, M.M. Alkaisi , G. Kumaravelu, R.J. Blaikie, R.J. Reeves, A. Bittar, "Sub-Wavelength Texturing for Solar Cells Using Interferometric Lithography ", Advances in Science and Technology, Vol. 51, pp. 115-120, 2006
Online since
October 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Wei Ying Ou, Yao Zhang, Hai Ling Li, Lei Zhao, Chun Lan Zhou, Hong Wei Diao, Min Liu, Wei Ming Lu, Jun Zhang, Wen Jing Wang
Abstract:Texturing for mono-crystalline silicon solar cell by chemical anisotropic etching is one of the most important techniques in photovoltaic...
26
Authors: Dae Young Kong, Chan Seob Cho, Jun Hwan Jo, Bong Hwan Kim, Jong Hyun Lee
Chapter 1: Manufacturing Technology and Processing
Abstract:Surface texturing is an important process to enhance light absorption and to improve efficiency of a solar cell. Reactive ion etching (RIE)...
747
Authors: Leszek Adam Dobrzański, A. Drygała
Chapter 6: Energy Materials
Abstract:This paper presents technology of multicrystalline silicon solar cells with laser texturisation step. The texturing of polycrystalline...
829
Authors: Yan Chao, Li Qun Wu
Chapter 6: Nanomaterials
Abstract:As a renewable, clear and inexhaustible energy, solar energy receives much more attention and has partly substituted traditional energies in...
781
Authors: Su Zhou, Chun Lan Zhou, Jun Jie Zhu, Wen Jing Wang, Jing Wei Chen
Chapter 2: Applied Materials in Industry
Abstract:Isopropyl alcohol (IPA) is widely used as an additive to enhance the alkaline texturing process of mono-crystalline silicon solar cells...
129