Long term service of the materials under stresses and at attacking environments causes material damages, leading to fractures. Among a lot of the material damages, creep cavity and fatigue crack are principal targets to be self healed autonomously during actual service of materials. Since the creep cavity and the fatigue crack are generally too fine to be detected during actual service and difficult to be repaired at the service sites. Recently self healing of creep cavity and fatigue crack has been developed. In the developed methods, segregation and precipitation of solute atoms were applied to self healing of the damages. The self healing methods are comparatively simple and low cost, which may make it easy to be applied to many materials.