Carbon Nanofibers (CNF) layers were synthesized nickel-based thin-films on flat fused silica substrates. CNF synthesis was performed via thermal catalytic chemical vapor deposition of ethylene using nickel as metal catalyst. Different underlayer metal thin films, viz. titanium, tantalum and titanium-tungsten were tested in order to obtain stable and well-attached CNF films on fused silica substrates. It is found in case of titanium CNFs are formed on the nickel, but due to severe Ni/Ti inderdiffusion the titanium film looses its adhesive function, as a consequence of which the formed CNF film detaches from the substrate. The use of tantalum or titanium-tungsten as adhesion layer resulted in stable and well-adhered CNF films on fused silica substrates, of which the morphology can be controlled by the growth time.