Paper Title:
A Review of Test Structures for Characterising Microelectronic and MEMS Technology
  Abstract

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.

  Info
Periodical
Edited by
Pietro VINCENZINI and Giuseppe D'ARRIGO
Pages
356-365
DOI
10.4028/www.scientific.net/AST.54.356
Citation
A. J. Walton, S. Smith, "A Review of Test Structures for Characterising Microelectronic and MEMS Technology", Advances in Science and Technology, Vol. 54, pp. 356-365, 2008
Online since
September 2008
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