Paper Title:
GaAs Non Resonant Micro-Sensors: Design and Simulations
  Abstract

This paper reports on the design of piezoresistive GaAs sensors and focuses on non conventional orientations. The piezoresistive detection of in-plane longitudinal and shear stresses is studied to determine the best orientations for pressure and force sensors. Simulation of shapes for micromachined membranes and cantilevers allows us to select some (hk0) orientations for which the sensitivity is evaluated.

  Info
Periodical
Edited by
Pietro VINCENZINI and Giuseppe D'ARRIGO
Pages
428-433
DOI
10.4028/www.scientific.net/AST.54.428
Citation
C.R. Tellier, S. Durand, "GaAs Non Resonant Micro-Sensors: Design and Simulations", Advances in Science and Technology, Vol. 54, pp. 428-433, 2008
Online since
September 2008
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Price
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