Paper Title:
Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses
  Abstract

ZrN/TiN multi-layers were synthesized by ion beam sputtering technique. Microstructure and mechanical property of the ZrN/TiN multi-layers were characterized and the relationships between microstructure and hardness of the ZrN/TiN multi-layers with various bilayer thicknesses and thickness ratios were investigated. The microstructure of multi-layers have been investigated using transmission electron microscope (TEM) and X-ray diffraction (XRD).

  Info
Periodical
Edited by
Pietro VINCENZINI, Ralf RIEDEL, Alexander G. MERZHANOV and Chang-Chun GE
Pages
392-395
DOI
10.4028/www.scientific.net/AST.63.392
Citation
Y. Aoi, S. Furuhata, H. Nakano, "Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses", Advances in Science and Technology, Vol. 63, pp. 392-395, 2010
Online since
October 2010
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