Paper Title:
Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching
  Abstract

Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here is the type of chemical etchant used: hydrochloric (HCl), hydrophosphoric (H3PO4) and hydrobromic (HBr) acids; and, numerical parameters are etching temperature and etching solution. The experimental investigation that was carried out is governed by design of experiment (DoE).

  Info
Periodical
Edited by
Pietro VINCENZINI, Sheldon WIEDERHORN and Paolo COLOMBO
Pages
251-256
DOI
10.4028/www.scientific.net/AST.65.251
Citation
H. T. Ting, K. A. Abou-El-Hossein, H. B. Chua, "Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching", Advances in Science and Technology, Vol. 65, pp. 251-256, 2010
Online since
October 2010
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