Papers by keyword «Aluminium» and «Ion Implantation»
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Electrical and Structural Properties of Al and B Implanted 4H-SiC
Authors: Yasunori Tanaka, Naoto Kobayashi, Hajime Okumura, Ryoichi Suzuki, Toshiyuki Ohdaira, Mitsuru Hasegawa, M. Ogura, Sadafumi Yoshida, Hisao Tanoue
Keywords: Aluminium, Boron, DI Center, Divacancy, Hall-Effect Measurement, Ion Implantation, Photoluminescence (PL), Positron Annihilation Spectroscopy, Vacancy
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High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing
Authors: D. Panknin, H. Wirth, W. Anwand, Gerhard Brauer, Wolfgang Skorupa
Keywords: Aluminium, Annealing, Electrical Activation, Ion Implantation, Nitrogen
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On the Pitting Resistance of Tungsten Implanted Aluminium
Authors: Jorge Cruz Fernandes, Mário G.S. Ferreira
Keywords: Aluminium, Ion Implantation, Pitting, Tungsten
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Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC
Authors: Hiroki Nakamura, H. Watanabe, J. Yamazaki, Nobuo Tanaka, Rajesh Kumar Malhan
Keywords: Acceptor, Aluminium, Defect, Ion Implantation, Lamp Annealing, Surface Morphology
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Masking Process for High-Energy and High-Temperature Ion Implantation
Authors: Takasumi Ohyanagi, Hidekatsu Onose, Atsuo Watanabe, Tomoyuki Someya, Toshiyuki Ohno, Kensuke Amemiya, Yutaka Kobayashi
Keywords: Aluminium, Ion Implantation, JFET, Mask, Silicon Dioxide
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Electrical Activation of Ion-Implanted Nitrogen and Aluminum in 4H-SiC by Excimer Laser Annealing
Authors: Yasunori Tanaka, Hisao Tanoue, Kazuo Arai
Keywords: Aluminium, Electrical Activation, Excimer Laser Annealing, Ion Implantation, Nitrogen
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Study on the Properties of Alumina Ceramics after Implanted by Titanium Ions with MEVVA Sources
Authors: Feng Shi, He Zhuo Miao, Zhi Jian Peng, Wen Zhi Li
Keywords: Aluminium, Ion Implantation, MEVVA
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