Paper Title:
Impurity Diffusion in Silicon under Strong Interaction with the Point Defect Clusters
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 103-105)
Edited by
Nickolay T. Bagraev
Pages
239-242
DOI
10.4028/www.scientific.net/DDF.103-105.239
Citation
V.I. Pashkov, V.A. Perevoshchikov, V.D. Skupov, "Impurity Diffusion in Silicon under Strong Interaction with the Point Defect Clusters", Defect and Diffusion Forum, Vols. 103-105, pp. 239-242, 1993
Online since
January 1993
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Price
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