Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon |
| Journal |
Defect and Diffusion Forum (Volumes 115 - 116) |
| Volume |
Defect and Diffusion Forum Vols. 115-116 |
| Edited by |
David J. Fisher |
| Pages |
85-0 |
| DOI |
10.4028/www.scientific.net/DDF.115-116.85 |
| Citation |
Shingo Sumie et al., 1994, Defect and Diffusion Forum, 115-116, 85 |
| Authors |
Shingo Sumie, Hiroyuki Takamatsu, Taneo Nishino |
| Keywords |
Interferometer, Photothermal Displacement, Plasma Etching Damage, Polishing Damage, Silicon, Thermal Expansion |
| Full Paper |
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