Paper Title:
Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 115-116)
Edited by
David J. Fisher
Pages
85-0
DOI
10.4028/www.scientific.net/DDF.115-116.85
Citation
S. Sumie, H. Takamatsu, T. Nishino, "Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon", Defect and Diffusion Forum, Vols. 115-116, pp. 85-0, 1994
Online since
January 1994
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$32.00
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