Paper Title:
Superdiffusion in Semiconductors (Electron-Beam Doping)
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 117-118)
Edited by
David J. Fisher
Pages
13-44
DOI
10.4028/www.scientific.net/DDF.117-118.13
Citation
T. Wada, "Superdiffusion in Semiconductors (Electron-Beam Doping) ", Defect and Diffusion Forum, Vols. 117-118, pp. 13-44, 1995
Online since
January 1995
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Price
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