Paper Title:
Reconstruction Mechanisms in Ion Implanted and Annealed Silicon Wafers
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 117-118)
Edited by
David J. Fisher
Pages
45-64
DOI
10.4028/www.scientific.net/DDF.117-118.45
Citation
C. Christofides, A. Seas, A. Othonos, "Reconstruction Mechanisms in Ion Implanted and Annealed Silicon Wafers ", Defect and Diffusion Forum, Vols. 117-118, pp. 45-64, 1995
Online since
January 1995
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Price
$32.00
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