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Selective Mixing of GaAs/(Ga,Al)As Interfaces by Ga+ Implantation

Journal Defect and Diffusion Forum (Volumes 119 - 120)
Volume Defect and Diffusion Forum Vols. 119-120
Pages 127-174
DOI 10.4028/www.scientific.net/DDF.119-120.127
Citation C. Vieu, 1995, Defect and Diffusion Forum, 119-120, 127
Authors C. Vieu
Keywords Amorphisation, Cathodoluminescence, GaAs/AlGaAs Heterojunction, Interdiffusion, Ion Beam Damage, Ion Beam Mixing, Ion-Implantation, Nano Structure, Photoluminescence (PL), Quantum Wire, Secondary Ion Mass Spectroscopy (SIMS), TEM, Thermal Annealing
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