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Formation Mechanisms of Paramagnetic Centers in Si/SiO2 Structures

Journal Defect and Diffusion Forum (Volumes 127 - 128)
Volume Defect and Diffusion Forum Vols. 127-128
Pages 1-8
DOI 10.4028/www.scientific.net/DDF.127-128.1
Citation K. Awazu et al., 1995, Defect and Diffusion Forum, 127-128, 1
Authors K. Awazu, K. Watanabe, Hiroshi Kawazoe
Keywords a-SiO2 Film, E' Center, Pb Centers, Paramagnetic Centers, Radiation Induced Defects, Si/SiO2 Structure
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