Paper Title:
Stresses during Silicide Formation: A Review
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 129-130)
Edited by
D.L. Beke and I.A. Szabó
Pages
137-150
DOI
10.4028/www.scientific.net/DDF.129-130.137
Citation
F. M. d'Heurle, O. Thomas, "Stresses during Silicide Formation: A Review", Defect and Diffusion Forum, Vols. 129-130, pp. 137-150, 1996
Online since
March 1996
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Price
$32.00
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