Stresses during Silicide Formation: A Review |
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| Journal | Defect and Diffusion Forum (Volumes 129 - 130) |
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| Volume | Diffusion and Stresses |
| Edited by | D.L. Beke and I.A. Szabó |
| Pages | 137-150 |
| DOI | 10.4028/www.scientific.net/DDF.129-130.137 |
| Citation | François M. d'Heurle et al., 1996, Defect and Diffusion Forum, 129-130, 137 |
| Authors | François M. d'Heurle, Olivier Thomas |
| Keywords | Interdiffusion, Nucleation, Phase Growth Kinetics, Reaction, Silicide, Stress |
| Full Paper | 
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