New Applications of Porous Silicon |
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| Journal | Defect and Diffusion Forum (Volumes 134 - 135) |
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| Volume | Defect and Diffusion Forum Vols. 134-135 |
| Edited by | David J. Fisher |
| Pages | 15-24 |
| DOI | 10.4028/www.scientific.net/DDF.134-135.15 |
| Citation | G. Amato et al., 1996, Defect and Diffusion Forum, 134-135, 15 |
| Authors | G. Amato, N. Brunetto |
| Keywords | Micro Machining, Porous Silicon (PS), Silicon Sensors |
| Full Paper | 
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