Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering |
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| Journal | Defect and Diffusion Forum (Volumes 134 - 135) |
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| Volume | Defect and Diffusion Forum Vols. 134-135 |
| Edited by | David J. Fisher |
| Pages | 3-14 |
| DOI | 10.4028/www.scientific.net/DDF.134-135.3 |
| Authors | G. Fusco, Fabrizio Giorgis, C. Fabrizio Pirri, Alberto Tagliaferro, Elena Tresso, C. De Martino, P. Rava |
| Keywords | Boron-Nitrogen Alloys, Carbon-Nitrogen Alloys, Hard Coating, Structural Properties |
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