Paper Title:
Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 134-135)
Edited by
David J. Fisher
Pages
3-14
DOI
10.4028/www.scientific.net/DDF.134-135.3
Citation
G. Fusco, F. Giorgis, C. F. Pirri, A. Tagliaferro, E. Tresso, C. De Martino, P. Rava, "Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering", Defect and Diffusion Forum, Vols. 134-135, pp. 3-14, 1996
Online since
March 1996
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Price
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