Analysis of Minute StrainFields around Microdefects in Silicion Crystals by Plane-Wave X-Ray Topography |
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| Journal | Defect and Diffusion Forum (Volumes 138 - 139) |
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| Volume | Defect and Diffusion Forum Vols. 138-139 |
| Edited by | David J. Fisher |
| Pages | 49-62 |
| DOI | 10.4028/www.scientific.net/DDF.138-139.49 |
| Authors | Shigeru Kimura, Takashi Ishikawa, J. Matsui |
| Keywords | Fourier Transform Infrared Spectroscopy, Lattice Strains, Microdefect, Oxygen Precipitation, Plane-Wave X-Ray Topography, Silicon, Synchroton Radiation |
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