Paper Title:
Short-Time Diffusion of Aluminium in Silicon and Co-Diffusion with Phosphorus and Boron
  Abstract

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Periodical
Defect and Diffusion Forum (Volumes 143-147)
Edited by
H. Mehrer, Chr. Herzig, N.A. Stolwijk, H. Bracht
Pages
1009-1014
DOI
10.4028/www.scientific.net/DDF.143-147.1009
Citation
U. Kuhlmann, D. Nagel, R. Sittig, "Short-Time Diffusion of Aluminium in Silicon and Co-Diffusion with Phosphorus and Boron", Defect and Diffusion Forum, Vols. 143-147, pp. 1009-1014, 1997
Online since
January 1997
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Price
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