Paper Title:
On Point Defect Gettering by Back-Side Damage in the Si-SiO2 System
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 143-147)
Edited by
H. Mehrer, Chr. Herzig, N.A. Stolwijk, H. Bracht
Pages
1027-1030
DOI
10.4028/www.scientific.net/DDF.143-147.1027
Citation
D. Kropman, S. Dolgov, T. Kärner, "On Point Defect Gettering by Back-Side Damage in the Si-SiO2 System", Defect and Diffusion Forum, Vols. 143-147, pp. 1027-1030, 1997
Online since
January 1997
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Price
$32.00
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