Paper Title:
Low Temperature Impurity Diffusion in 6H-SiC
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 143-147)
Edited by
H. Mehrer, Chr. Herzig, N.A. Stolwijk, H. Bracht
Pages
1147-1152
DOI
10.4028/www.scientific.net/DDF.143-147.1147
Citation
N. T. Bagraev, L.E. Klyachkin, A.M. Malyarenko, V.L. Sukhanov, N.V. Zabrodskaya, "Low Temperature Impurity Diffusion in 6H-SiC", Defect and Diffusion Forum, Vols. 143-147, pp. 1147-1152, 1997
Online since
January 1997
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Price
$32.00
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