Paper Title:
Diffusion Barriers in Semiconductor Contact Technology
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 143-147)
Edited by
H. Mehrer, Chr. Herzig, N.A. Stolwijk, H. Bracht
Pages
1271-1284
DOI
10.4028/www.scientific.net/DDF.143-147.1271
Citation
M.-A. Nicolet, "Diffusion Barriers in Semiconductor Contact Technology", Defect and Diffusion Forum, Vols. 143-147, pp. 1271-1284, 1997
Online since
January 1997
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Price
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