Paper Title:
Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 148-149)
Edited by
David J. Fisher
Pages
103-121
DOI
10.4028/www.scientific.net/DDF.148-149.103
Citation
H. Cerva, "Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations", Defect and Diffusion Forum, Vols. 148-149, pp. 103-121, 1997
Online since
March 1997
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Price
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