Pressure and Stress Effects on Diffusion in Si |
|
| Journal | Defect and Diffusion Forum (Volumes 153 - 155) |
|---|---|
| Volume | Diffusion in Silicon |
| Edited by | D.J. Fisher |
| Pages | 1-10 |
| DOI | 10.4028/www.scientific.net/DDF.153-155.1 |
| Authors | M.J. Aziz |
| Keywords | Antimony, Arsenic, Biaxial Stresses, Boron, Diffusion Mechanism, Dopant Diffusion, Germanium, Nonhydrostatic Stress, Self-Diffusion, Silicon, Thermodynamic |
| Full Paper |
Get the full paper by clicking here
|