Vacancy Distributions in Silicon and Methods for Their Accurate Determination |
| Journal |
Defect and Diffusion Forum (Volumes 153 - 155) |
| Volume |
Diffusion in Silicon |
| Edited by |
D.J. Fisher |
| Pages |
111-136 |
| DOI |
10.4028/www.scientific.net/DDF.153-155.111 |
| Citation |
Horst Zimmermann, 1997, Defect and Diffusion Forum, 153-155, 111 |
| Authors |
Horst Zimmermann |
| Keywords |
Deep Level Transient Spectroscopy, Diffusion, Method for Vacancy Concentration Measurement, Microwave Photoconductive Decay (μ-PCD), Self-Interstitial, Vacancy, Wafer Mapping |
| Full Paper |
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