Paper Title:
Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance
  Abstract

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Periodical
Defect and Diffusion Forum (Volumes 153-155)
Edited by
D.J. Fisher
Pages
137-158
DOI
10.4028/www.scientific.net/DDF.153-155.137
Citation
E. Rimini, S. Coffa, S. Libertino, G. Mannino, F. Priolo, V. Privitera, "Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance", Defect and Diffusion Forum, Vols. 153-155, pp. 137-158, 1998
Online since
November 1997
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