Review of Growth Striations in CZ and MCZ Silicon Wafers |
| Journal |
Defect and Diffusion Forum (Volumes 153 - 155) |
| Volume |
Diffusion in Silicon |
| Edited by |
D.J. Fisher |
| Pages |
159-182 |
| DOI |
10.4028/www.scientific.net/DDF.153-155.159 |
| Citation |
H. Yamagishi, 1997, Defect and Diffusion Forum, 153-155, 159 |
| Authors |
H. Yamagishi |
| Keywords |
COP, Denuded Zones, Dopant Striation, FPDs, Growth Striations, Interstitial Oxygen, LSTDs, Oxygen Micro-Distribution Profile, Oxygen Micro-Precipitation Profile, Oxygen Segregation Coefficient, Oxygen Striation |
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