Paper Title:
Review of Growth Striations in CZ and MCZ Silicon Wafers
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 153-155)
Edited by
D.J. Fisher
Pages
159-182
DOI
10.4028/www.scientific.net/DDF.153-155.159
Citation
H. Yamagishi, "Review of Growth Striations in CZ and MCZ Silicon Wafers", Defect and Diffusion Forum, Vols. 153-155, pp. 159-182, 1998
Online since
November 1997
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Price
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