Paper Title:
Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 153-155)
Edited by
D.J. Fisher
Pages
205-0
DOI
10.4028/www.scientific.net/DDF.153-155.205
Citation
N.K. Chen, K.C. Yu, C. Lee, "Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon", Defect and Diffusion Forum, Vols. 153-155, pp. 205-0, 1998
Online since
November 1997
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Price
$32.00
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