Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon |
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| Journal | Defect and Diffusion Forum (Volumes 153 - 155) |
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| Volume | Diffusion in Silicon |
| Edited by | D.J. Fisher |
| Pages | 205-0 |
| DOI | 10.4028/www.scientific.net/DDF.153-155.205 |
| Authors | N.K. Chen, K.C. Yu, C. Lee |
| Keywords | Diffusion of Interstitials, Nitridation Treatments, Stacking-Fault Shrinkage |
| Full Paper | 
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