Paper Title:
Propagation of Dry Etch-Induced Damage in III-V Semiconductors
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 157-159)
Edited by
D.J. Fisher
Pages
175-190
DOI
10.4028/www.scientific.net/DDF.157-159.175
Citation
C. H. Chen, E. L. Hu, "Propagation of Dry Etch-Induced Damage in III-V Semiconductors", Defect and Diffusion Forum, Vols. 157-159, pp. 175-190, 1998
Online since
March 1998
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Price
$32.00
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