Propagation of Dry Etch-Induced Damage in III-V Semiconductors |
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| Journal | Defect and Diffusion Forum (Volumes 157 - 159) |
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| Volume | Diffusion in GaAs and other III-V Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 175-190 |
| DOI | 10.4028/www.scientific.net/DDF.157-159.175 |
| Citation | Ching Hui Chen et al., 1998, Defect and Diffusion Forum, 157-159, 175 |
| Authors | Ching Hui Chen, Evelyne L. Hu |
| Keywords | Ion Channeling, Ion-Assisted Dry Etching, Ion-Induced Damage, Multiple Quantum Wells, Radiation-Enhanced Diffusion |
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