Paper Title:
The Investigation of Structures, Defects and Electrical Properties of GaAs Films Implanted with Arsenic Ions
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 157-159)
Edited by
D.J. Fisher
Pages
37-62
DOI
10.4028/www.scientific.net/DDF.157-159.37
Citation
W.-C. Chen, S.-C. Lee, C.S. Chang, "The Investigation of Structures, Defects and Electrical Properties of GaAs Films Implanted with Arsenic Ions", Defect and Diffusion Forum, Vols. 157-159, pp. 37-62, 1998
Online since
March 1998
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Price
$32.00
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