Diffusion of Dopants and Impurities in GaN and Related Materials |
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| Journal | Defect and Diffusion Forum (Volumes 157 - 159) |
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| Volume | Diffusion in GaAs and other III-V Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 63-82 |
| DOI | 10.4028/www.scientific.net/DDF.157-159.63 |
| Citation | S.J. Pearton et al., 1998, Defect and Diffusion Forum, 157-159, 63 |
| Authors | S.J. Pearton, R.G. Wilson, J.C. Zolper, John M. Zavada |
| Keywords | Annealing, Hydrogen, Redistribution |
| Full Paper | 
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