On the Incorporation of Carbon In SiO2 Layers |
| Journal |
Defect and Diffusion Forum (Volumes 160 - 161) |
| Volume |
Surface Diffusion and Surface Structure |
| Edited by |
D.J. Fisher |
| Pages |
1-24 |
| DOI |
10.4028/www.scientific.net/DDF.160-161.1 |
| Citation |
B. Garrido et al., 1998, Defect and Diffusion Forum, 160-161, 1 |
| Authors |
B. Garrido, C. Bonafos, M. López, A. Cuadras, A. Pérez-Rodríguez, Klaus Pressel, J.R. Morante |
| Keywords |
Carbon Diffusion, Ion-Implantation, Luminescence, Oxidation, Si1-yCy |
| Full Paper |
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