Theory of Enhanced/Retarded Diffusion of Donor/Acceptor Dopants in Predoped Silicon |
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| Journal | Defect and Diffusion Forum (Volumes 171 - 172) |
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| Volume | Defects and Diffusion in Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 45-60 |
| DOI | 10.4028/www.scientific.net/DDF.171-172.45 |
| Citation | E. Antoncik, 1999, Defect and Diffusion Forum, 171-172, 45 |
| Authors | E. Antoncik |
| Keywords | Diffusion Profiles, Predoping, Reaction-Diffusion Equations, Steady-State Approximation |
| Full Paper | 
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