Paper Title:
Morphological, Structural and Electronic Damage on InAs and InSb Surfaces Induced by (Reactive) Ion Beam Etching
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 183-185)
Edited by
D.J. Fisher
Pages
127-146
DOI
10.4028/www.scientific.net/DDF.183-185.127
Citation
F. Frost, G. Lippold, A. Schindler, F. Bigl, "Morphological, Structural and Electronic Damage on InAs and InSb Surfaces Induced by (Reactive) Ion Beam Etching", Defect and Diffusion Forum, Vols. 183-185, pp. 127-146, 2000
Online since
August 2000
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Price
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