Diffusion of Zinc in InP, InAsP and InGaAs by the Metal-Organic Vapor-Phase Diffusion Technique |
| Journal |
Defect and Diffusion Forum (Volumes 183 - 185) |
| Volume |
Defects and Diffusion in Semiconductors |
| Edited by |
D.J. Fisher |
| Pages |
153-162 |
| DOI |
10.4028/www.scientific.net/DDF.183-185.153 |
| Citation |
M. Wada et al., 2000, Defect and Diffusion Forum, 183-185, 153 |
| Authors |
M. Wada, K. Sakakibara, T. Umezawa, S. Nakajima, S. Araki, T. Kudou, T. Ueda |
| Keywords |
Diffusion, Dimethylzinc, InAsP, InGaAs, InP, Metal-Organic Source, Zinc |
| Full Paper |
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