Influence of In-Doping on the Crystalline Quality of GaAs Epilayers on Si Substrates |
| Journal |
Defect and Diffusion Forum (Volumes 183 - 185) |
| Volume |
Defects and Diffusion in Semiconductors |
| Edited by |
D.J. Fisher |
| Pages |
77-84 |
| DOI |
10.4028/www.scientific.net/DDF.183-185.77 |
| Citation |
Y. Takano et al., 2000, Defect and Diffusion Forum, 183-185, 77 |
| Authors |
Y. Takano, Shunro Fuke |
| Keywords |
GaAs-on-Si, InGaAs, Lattice-Mismatched Epitaxy, MOVPE, Thermal Cycle Annealing, Thermal Strain, Threading Dislocation Density |
| Full Paper |
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