Paper Title:
The Influence of Deposition Conditions upon the Development of Solid-State Reactions in the Ta-Si Thin Film Systemi
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 194-199)
Edited by
Y. Limoge and J.L. Bocquet
Pages
1643-1648
DOI
10.4028/www.scientific.net/DDF.194-199.1643
Citation
Y.N. Makogon, E.P. Pavlova, S. I. Sidorenko, "The Influence of Deposition Conditions upon the Development of Solid-State Reactions in the Ta-Si Thin Film Systemi", Defect and Diffusion Forum, Vols. 194-199, pp. 1643-1648, 2001
Online since
April 2001
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Price
$32.00
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