Paper Title:
Phosphorus Diffusion in Si1-x Gex
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 194-199)
Edited by
Y. Limoge and J.L. Bocquet
Pages
709-716
DOI
10.4028/www.scientific.net/DDF.194-199.709
Citation
J.S. Christensen, A. Y. Kuznetsov, H.H. Radamson, B. G. Svensson, "Phosphorus Diffusion in Si1-x Gex", Defect and Diffusion Forum, Vols. 194-199, pp. 709-716, 2001
Online since
April 2001
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Price
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