X-Ray Topographic Analysis of Misfit Dislocation Distribution in InGaAs and GeSi/Si Partially Relaxed Heterostructures |
|
| Journal | Defect and Diffusion Forum (Volumes 200 - 202) |
|---|---|
| Volume | Defects and Diffusion in Semiconductors IV |
| Edited by | D.J. Fisher |
| Pages | 153-160 |
| DOI | 10.4028/www.scientific.net/DDF.200-202.153 |
| Citation | C. Ferrari, 2001, Defect and Diffusion Forum, 200-202, 153 |
| Authors | C. Ferrari |
| Keywords | Misfit Dislocation Distribution, Threading Dislocation, X-Ray Topography |
| Full Paper |
Get the full paper by clicking here
|
